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As the field of Microsystems expands into more disciplines and new applications such as RF-MEMS, Optical MEMS and Bio-MEMS, thermal management is beco...Savoir plus
Micromachined scanning mirrors are interesting for a wide variety of applications because of their potential low cost, high speed, low power consumpti...Savoir plus
The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "e...Savoir plus
Microcantilevers for Atomic Force Microscope Data Storage describes a research collaboration between IBM Almaden and Stanford University in which a ne...Savoir plus
Advanced Mechatronics and MEMS Devices describes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical micro...Savoir plus
Advanced Mechatronics and MEMS Devices describes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical micro...Savoir plus
Here is a textbook for senior undergraduate and graduate level students that offers a novel and systematic look into the dynamics of MEMS. It includes...Savoir plus
Micromachined scanning mirrors are interesting for a wide variety of applications because of their potential low cost, high speed, low power consumpti...Savoir plus
Advances in the semiconductor technology have enabled steady, exponential im- provement in the performance of integrated circuits. Miniaturization all...Savoir plus
This much-needed textbook is an exploration of a key area of study in mechanics. It is suitable for senior undergraduate and graduate level students a...Savoir plus
MEMS and their unique behavior.- Lumped modeling principles.- Lumped modeling of MEMS devices.- Introduction to nonlinear mechanics.- Introduction to ...Savoir plus
Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasi...Savoir plus
This is perhaps the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after ...Savoir plus
Augmented Materials and Smart Objects investigates the issues required to ensure technology platforms capable of being seamlessly integrated into ever...Savoir plus
Interfaces between dissimilar materials are met everywhere in microelectronics and microsystems. In order to ensure faultless operation of these highl...Savoir plus
Over the past two decades, technologies for microsystems fabrication have made considerable progress. This has made possible a large variety of new co...Savoir plus
The Microsystems Series has as its goal the creation of an outstanding set of textbooks, references, and monographs on subjects that span the broad fi...Savoir plus
The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicia...Savoir plus
The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicia...Savoir plus
The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "e...Savoir plus
Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that use...Savoir plus
Microcantilevers for Atomic Force Microscope Data Storage describes a research collaboration between IBM Almaden and Stanford University in which a ne...Savoir plus
Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that use...Savoir plus